Описание

Wide-Area 3D Measurement System Macroscope Head
Model VR-3200
Type Head
Applicable controller VR-3000K
Field-of-view Wide-field mode Magnification on a 15' monitor 12x Horizontal 24 mm
Vertical 18 mm
Magnification on a 15' monitor 25x Horizontal 12 mm
Vertical 9 mm
Magnification on a 15' monitor 38x Horizontal 8 mm
Vertical 6 mm
Magnification on a 15' monitor 50x Horizontal
Vertical 4.5 mm
High magnification mode Magnification on a 15' monitor 40x Horizontal 7.6 mm
Vertical 5.7 mm
Magnification on a 15' monitor 80x Horizontal 3.8 mm
Vertical 2.9 mm
Magnification on a 15' monitor 120x Horizontal 2.5 mm
Vertical 1.9 mm
Magnification on a 15' monitor 160x Horizontal
Vertical 1.4 mm
Zoom 1x to 4x
Measurement accuracy Height measurement ±3 µm*1
Width measurement Wide-field mode: ±5 µm, High magnification mode: ±2 µm*1
Stitching function Full automatic (XY stage automatic control + auto focus) measurement*2 Auto adjustment, Auto template analysis*2
Stage Z stroke 90 mm (electric)
Rotation ±180°(sample rotating stage)
Tilt ±30° or more
Working distance 75 mm
Image receiving element 4 megapixel monochrome CMOS
Transmitter lens Double telecentric lens x2
Receiver lens Double telecentric lens
Light sources Observation light source LED ring light (red, green, blue)
Measurement light source White LED
Image size 1024 x 768 pixels, 2048 x 1536 pixels
Rating Power voltage 100 to 240 VAC ±10 %, 50/60 Hz
Power consumption 150 VA
Environmental resistance Ambient temperature +15 to +30 °C
Relative humidity 35 to 80 % RH (No condensation)
Weight 28.0 kg
*1 Value obtained using KEYENCE's specified standard gauge with measurement in KEYENCE's specified measurement mode (ambient temperature: 23±1°C). *2 The stitching module (VR-H2J) is required.
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